Precision of Double-Anode Localized Electrochemical Deposition system and Double helix DNA structure Control System
碩士 === 國立中央大學 === 機械工程學系 === 107 === In past years, Semiconductor technology is rapidly developed. Most of Semiconductor products were made by PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), photolithography, lithography, etc. However, in recent years, for fabricated complex 3D mic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89d95b |