Fabrication of Nanocrystal by Cryogenic Electrochemical Anodic Etching on Silicon Substrate
碩士 === 國立中央大學 === 機械工程學系 === 107 === In this study, we perform cryogenic laser-assisted electrochemical etching on heavily doped p-type silicon wafer, and observe the influence of low temperature. Since the carrier mobility of silicon wafer is about 120(cm2/V•s) at room temperature, 108(cm2/V•s) at...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/gk5asu |