UPH Improvement and Reliability Analysis of Experimental Plasma Cleaning and Sealing Time
碩士 === 國立高雄科技大學 === 工業工程與管理系 === 107 === In order to overcome the semiconductor industrys Cycle time problem, two parts will be studied through this study. The first part will study the plasma-activated substrate time, and use the Dummy test to see if the three cleaning parameters meet the best regu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/meh6rh |