Electrical Properties of Indium Nitrogen Compound Doped Oxygen in Relative Humidity
碩士 === 國立高雄科技大學 === 微電子工程系 === 107 === DC sputtering system was used to grow the indium nitride (InN) with the oxygen doping (InN:O) as a sensing film. In this study,silicon (Si) substrates was used to explore the sensitivity and responsivity of InN:O sensing film.First, by using Hall measurement sy...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x4v244 |