The Studies on Elimination of Shock Sansitivity of Hexachlorodisilane by Alkaline Alcohol Solutions
碩士 === 國立高雄科技大學 === 環境與安全衛生工程系 === 107 === Hexachlorodisilane (HCDS), which is a stable and non-volatile, but easily hydrolyzed with water vapor, is the most important raw material in Atomic Layer Decomposition (ALD) technology in modern semiconductors. The deposits after hydrolysis reaction wit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/r99prw |