Low-loss Ta2O5/SiO2 planar waveguides on quartz substrate
碩士 === 國立中山大學 === 光電工程學系研究所 === 107 === In the thesis, single mode Ta2O5/SiO2 planar optical waveguides were fabricated and characterized. The 80nm-thick Ta2O5 core were formed by reactive of-sputtering on a quartz wafer. Then the 2.0μm wide Ta2O5 core was formed by CHF3 plasma etching. The device w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/r7pf6j |