Development and application of Tantalum Pentoxide (Ta2O5) film synthesized by the E-gun evaporation
碩士 === 國立中山大學 === 光電工程學系研究所 === 107 === To achieve high bit rate signal processing in the integrated optical system, the ultrafast all optical modulator is regarded as the key element in the modern optical communication system. In this thesis, using electron beam evaporation, high quality Ta2O5 film...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4u8wc2 |