Application of ZnO/AlO Superlattices as an Overlayer on -Nitride LED
碩士 === 國立中山大學 === 物理學系研究所 === 107 === This thesis mostly focuses on the AlO/ZnO superlattice epitaxy grown on a variety of LED substrates. In the beginning, AlO/ZnO superlattice was deposited on the LED substrates with atomic layer deposition (ALD). Secondly, the structure property inspection was ca...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/7vz3r2 |