Application of ZnO/AlO Superlattices as an Overlayer on -Nitride LED

• Main Authors: Yen-Ching Cheng, 鄭顏慶
• Other Authors: Yung-Sung Chen
• Format: Others
• Language: en_US
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/7vz3r2

碩士 === 國立中山大學 === 物理學系研究所 === 107 === This thesis mostly focuses on the AlO/ZnO superlattice epitaxy grown on a variety of LED substrates. In the beginning, AlO/ZnO superlattice was deposited on the LED substrates with atomic layer deposition (ALD). Secondly, the structure property inspection was carried out by means of X-ray diffraction (XRD), phi scan, grazing incident X-ray diffraction (GIXRD). Next, photoluminescence (PL) was conducted to manifest the optical characteristics of LEDs with AlO/ZnO superlattice deposited in the final run. Before the superlattice was grown, one of them is commercial blue light LED with SiO2 on top as an insulated layer and the other is pure blue light LED with GaN-doped only epitaxy. In the PL outcome, the commercial one emitted harmonious white light, meanwhile, the pure one stayed in blue. Finally, the samples were proceeded to Transmission electron microscope (TEM) scan. Under the observation, the ZnO/AlO superlattice grown onto the SiO2 one didn’t have clear borders between layers and it appeared to be stripe lines intertwined. One the other hand, the one having ZnO/AlO superlattice on the top but without SiO2 deposited turned out to own a period of excellent ZnO/AlO epitaxy, but after the first layer, the ZnO/AlO boundaries also became blurry.