The study of structural and electronic properties on Si(111) with active nitridation

碩士 === 國立中山大學 === 物理學系研究所 === 107 === The active nitridation surface was prepared with two-step growth through variation of the substrate temperature, cracking power, and different exposure time with NH3 source (purity is 99.5 percent). The surface was then checked through scanning tunneling microsc...

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Bibliographic Details
Main Authors: Ting Chen, 陳霆
Other Authors: Chien-Cheng Kuo
Format: Others
Language:en_US
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/9v9482