In₂O₃/ZnO Heterostructural Superlattices: Epitaxial Sputter-Growth and Physical Properties
碩士 === 國立中山大學 === 物理學系研究所 === 107 === The superlattices of In2O3/ZnO have been successfully fabricated by RF magnetron sputtering on c-oriented sapphire substrates at 923K. The film-substrate epitaxy is determined by X-ray diffraction (XRD) data based on the omega-2theta scans, Phi scans and Grazing...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fvvg9r |