Growth of ZnS/MoS2 Epitaxial Bilayers

碩士 === 國立中山大學 === 物理學系研究所 === 107 === In this study, in order to fulfill the uniform and large area growth of molybdenum sulfide film (MoS2), zinc sulfide (ZnS) film was pre-grown as a buffer layer on c-oriented sapphire substrate by atomic layer deposition (ALD), both of the two layers were grown u...

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Bibliographic Details
Main Authors: Ming-Chen Chou, 周明蓁
Other Authors: Quark Yung-Sung Chen
Format: Others
Language:en_US
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/e9v5w7