Fabrication of 3.5 GHz thin film bulk acoustic wave filter on sapphire substrate
碩士 === 國立中山大學 === 電機工程學系研究所 === 107 === In this study, the 3.5 GHz SMR filter is fabricated on sapphire substrate. The Bragg reflector is fabricated using molybdenum (Mo) and silicon dioxide (SiO2) as the high impedance and low impedance layers. The surface roughness is analyzed by atomic force micr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9x6r65 |