Fabrication of 2.4 GHz surface acoustic wave filter using the nano-imprinting lithography technology
碩士 === 國立中山大學 === 電機工程學系研究所 === 107 === In this study, high-frequency surface acoustic wave (SAW) devices with 2.4 GHz are designed and fabricated using E-beam lithography and nanoimprint technology. The interdigital transducers (IDT) patterns are designed using the line width of 400 nm, the delay-l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jhn8r5 |