HFSS Simulation for Predicting the Failure Factors in Plasma Treatment and Chip Delamination in Semiconductor Industry

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 107 === There are many processes in the semiconductor wire packaging process, including conductive adhesive dripping, die attaching, oven baking, plasma cleaning, die wire bonding and compound packaging. The semiconductor packaging factory found that under the same...

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Bibliographic Details
Main Authors: Hsiang-Ting Pai, 白祥廷
Other Authors: Che-Hsin Lin
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/xjc4aq