Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
碩士 === 國立清華大學 === 光電工程研究所 === 107
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fjrd8h |