Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition

碩士 === 國立清華大學 === 光電工程研究所 === 107

Bibliographic Details
Main Authors:	Chang, Lin-An, 張臨安
Other Authors:	Chao, Shiuh
Format:	Others
Language:	zh-TW
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/fjrd8h

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spelling	ndltd-TW-107NTHU51240022019-05-16T00:52:41Z http://ndltd.ncl.edu.tw/handle/fjrd8h Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition 以電漿輔助化學氣相沉積法鍍製高氮氮化矽薄膜其熱退火對光學特性與機械特性之影響 Chang, Lin-An 張臨安碩士國立清華大學光電工程研究所 107 Chao, Shiuh 趙煦 2018 學位論文 ; thesis 80 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 光電工程研究所 === 107
author2	Chao, Shiuh
author_facet	Chao, Shiuh Chang, Lin-An 張臨安
author	Chang, Lin-An 張臨安
spellingShingle	Chang, Lin-An 張臨安 Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
author_sort	Chang, Lin-An
title	Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
title_short	Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
title_full	Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
title_fullStr	Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
title_full_unstemmed	Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
title_sort	annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition
publishDate	2018
url	http://ndltd.ncl.edu.tw/handle/fjrd8h
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Annealing effect on the optical and mechanical properties of nitrogen-rich silicon nitride film fabricated by plasma enhance chemical vapor deposition

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