Study of annealing effect on the optical properties and the room temperature mechanical loss of the silicon-rich silicon nitride films deposited with PECVD
碩士 === 國立清華大學 === 光電工程研究所 === 107
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s779hj |