Advanced Qualification Method for Patterns with Irregular Edges in Printed Electronics
碩士 === 國立清華大學 === 動力機械工程學系 === 107 === To evaluate the pattern transfer completeness (PTC) with respect to the line edge roughness (LER), this paper proposes an advanced method which statistically quantifies the deviations of printed patterns from their corresponding designed patterns. Asymmetric pa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/md9p2y |