Interface Circuit Design to Enable Miniaturization of Thermal-Piezoresistive Oscillators for Mass Sensing Applications
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 107 === This work focuses on the integrated circuit design for CMOS-MEMS-based thermal-piezoresistive oscillators (TPOs). Conventional TPOs necessitate bulky discrete circuit components, which impedes integration and miniaturization of the microsystems. The proposed...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7f25g7 |