Fabrication of Au Nanohole Arrays by using Nanosphere Lithography for Refractive Index Sensing
碩士 === 國立臺灣海洋大學 === 光電科學研究所 === 107 === Different periodic nanohole arrays were fabricated using Nanosphere Lithography (NSL) to assemble different sizes of nanospheres on glass substrate. The size of the nanospheres was reduced by Reactive Ion Etching (RIE) followed by 50nm gold (Au) film depositio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pv7a2n |