Fabrication of Periodic Silver Nanorod Arrays by Plasma Etching for Refractive Index Sensing
碩士 === 國立臺灣海洋大學 === 光電科學研究所 === 107 === In this paper, periodic solid nano-pillar arrays have been fabricated and the related fabrication processes and the measurement of absorption spectrum were investigated. Self-assembled nano-sphere Lithography (NSL) followed by Reactive Ion Etching (RIE) with...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33wn88 |