To Recycle Calcium Fluoride Sludge for Mitigating Air Pollutant of a Semiconductor Fab
博士 === 國立臺灣大學 === 土木工程學研究所 === 107 === Generation of chemical wastes in semiconductor factories is inevitable. Nowadays, the circumstance of recycling chimcal wastes as reusable resources is increasing as time goes on. It becomes more urgent and more important to reduce the chemical wastes as well a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tzmj7h |