Characterization of ZnO Light Emitting Diodes Fabricated on Si substrates by RF-Sputtering
碩士 === 國立臺灣大學 === 光電工程學研究所 === 107 === In this thesis, the fabrication and characterization of ZnO/Si light emitting diode (LED) using radio frequency RF sputtering are presented. First, the theory of RF Sputtering system followed by material analysis is introduced. Second, the ZnO/Si LED devices ar...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f9k36r |