Silicon Waveguide Fabrication on Silicon Substrate by Using Wet-Oxidation Process
碩士 === 國立臺灣大學 === 光電工程學研究所 === 107 === The silicon waveguide is a basic component for implementing various photonic devices on a silicon-on-insulator (SOI) platform. Due to the high refractive index of silicon, the light can be well confined in the waveguide during propagation, and this allows the c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9thmk4 |