Design optimization and structural analysis of a 3D Abbe error-free wafer inspection stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === This thesis studies the detailed design, thermal analysis, and structural analysis of a self-built 3D Abbe-error free 12” wafer inspection stage. The structural components of the stage include base, gantry, X-stage, Y-stage, Z-stage, and vertical inspection pro...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bqjn5j |