Effects of Fabrication Parameters on the Electrical Properties of Barium titanate Thin Film
碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === In this thesis, we use three different substrate temperatures of Magnetron radio frequency sputter(Magnetron RF sputter) for sputtering and three different holding temperatures in the rapid thermal process(RTP) for vacuum annealing to prepare the high dielectr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/adk5j8 |