A Study on the Influence of Nonlinearity on Stability of Micromechanical Resoswitches
碩士 === 國立臺灣大學 === 應用力學研究所 === 107 === This thesis presents characterizations of the frequency stability of micromechan-ical clamped-clamped beam resonators operated under nonlinear tapping mode. Unlike traditional operation of MEMS resonators, which prefers linear operation for better frequency stab...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3bfx23 |