A CMOS-MEMS Mode-Localized Resonator Based on a Tuned-Mass-Damper Structure for Mass Sensing Applications
碩士 === 國立臺灣大學 === 應用力學研究所 === 107 === In this research, CMOS-MEMS 0.35-μm process platform is used to design the mode-localized resonator as a mass sensor. This research also uses the tuned mass damper design to couple a doubly clamped beam resonator and a cantilever resonator. The mode-coupling ach...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ut35rf |