Optical Low Coherence Interferometry to Quantify Silicon Wire Process Variation

碩士 === 國立臺灣科技大學 === 電子工程系 === 107 === In the component of the Silicon waveguide, the phase change of the light affects the wavelength response of the component, and the cause of the phase change mainly comes from the change in the effective refractive index between the waveguides. Microring Resonato...

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Bibliographic Details
Main Authors: Meng-Hui Shen, 沈孟輝
Other Authors: Shih-Hsiang Hsu
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/v6p963