Optical Low Coherence Interferometry to Quantify Silicon Wire Process Variation
碩士 === 國立臺灣科技大學 === 電子工程系 === 107 === In the component of the Silicon waveguide, the phase change of the light affects the wavelength response of the component, and the cause of the phase change mainly comes from the change in the effective refractive index between the waveguides. Microring Resonato...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/v6p963 |