Development of a Four-Degree-of- Freedom Common Path Linear Encoder
碩士 === 國立臺灣科技大學 === 機械工程系 === 107 === An innovative four-degree-of-freedom common path linear encoder with the ability to simultaneously measure both in and out of plane displacements and rotations is proposed in this study. This linear encoder combines the advantages of interferometry, grating inte...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a5369s |