Development of a Sinusoidal Modulation Double-diffraction Grating Interferometer for Displacement and Rotation Angle Measurements
碩士 === 國立臺灣科技大學 === 機械工程系 === 107 === Laser interferometers have come to be broadly utilized in the fields of semiconductor industry, precision machinery industry, microscopic techniques, optical alignment systems, and medical research. According to the signal detection scheme, interferometers can b...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5w9dej |