Growth and Optoelectronic Characterizations of MoS2 Thin Films on SiO2/Si Substrate by Chemical Vapor Deposition

碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 107 === This study presents a process for growth of Molybdenum disulfide (MoS2) thin films on SiO2/Si by chemical vapor deposition. Research included growth and optoelectronics characterizations of MoS2 from two different preparations. One is thermal vapor deposition...

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Bibliographic Details
Main Authors: Ming-Ju Lee, 李銘儒
Other Authors: Wen-Cheng Ke
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/2nq2c9