Growth and Application of Diamond-like Carbon thin film by Hybrid Plasma Chemical Vapor Deposition System
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 107 === In this study, a home made hybrid chemical vapor deposition system (Hybrid Plasma CVD, HPCVD) was used to grow a diamond-like carbon film on silicon substrate, and prepare high hardness diamond-like carbon film by adjusting the methane/hydrogen ratio flow, wo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85wbw6 |