Microstructure and Mechanical Properties of MoSiN Multilayer Coatings by Co-Sputtering Technique
碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 107 === In this research, the MoSiN single layer and multilayer films were fabricated by a reactive radio frequency, r.f., magnetron sputtering system with input power manipulation. The incorporation of Si contents in the coating was controlled from 0 to approximate...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/k8hyf9 |