Study of intrinsic/n-type MgZnO thin films
碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 107 === In this paper, N-type MgZnO films were grown by plasma-enhanced metal-organic chemical vapor deposition (PEMOCVD). The growth substrates were glass and silicon substrates. The effects of Mg concentration and substrate temperature on the Structure and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f52c62 |