The Mechanical Properties of TiN Thin Films
碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班在職專班 === 107 === Recent years, high power impulse magnetron sputtering (HIPIMS) technology has gained significant attention among researchers from different fields. By utilizing high pulsed power density, discharged plasma in the chamber is able to form thin film whi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22j48p |