Growth of Aluminum Nitride Films on Different Substrates by RF Magnetron Sputtering System
碩士 === 南臺科技大學 === 光電工程系 === 107 === In this study, RF magnetron Sputter was used to sputter an aluminum nitride (AlN) film on a silicon substrate, a sapphire substrate, and a patterned sapphire substrate, this aluminum nitride film will serve as a buffer layer between the LED substrate and the n-...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g3snju |