Low-coherent light source interferometer for thickness and parallelism measurements
碩士 === 國立臺北科技大學 === 光電工程系 === 107 === This research proposes an innovative interferometer capable of inspecting gauge block. It is composed of a white light laser, phase modulation module, and interferometric module; and it is able to achieve the inspections using two measurement modes: phase-sc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p573cc |