Six Degree of Freedom Interferometer for Detecting Geometric Errors of Precision Stages
碩士 === 國立臺北科技大學 === 光電工程系 === 107 === With the rapid development of Industry 4.0, smart factories have become the current industrial trend, where interferometers would be in charge of offline or online super-precision inspections. An interferometer, composed of a dual-frequency laser and six interfe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p4npa2 |