Synchronous Control of Gantry Stage Based on Laser Interferometer Feedback
碩士 === 國立臺北科技大學 === 機械工程系機電整合碩士班 === 107 === This thesis developed an ultra precise motion apparatus, with an air-bearing gantry stage driven by dual linear motors, feedback system of laser interferometer to get the high resolution and avoid the Abel error in this installation. The dynamic model of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/myr9gb |