CFD ANALYSIS OF RELATIVE HUMIDITY (RH) DISTRIBUTION INSIDE AN OPEN SI-WAFER BOX (FOUP) CAUSED BY OUTSIDE HUMID AIR AND DIFFERENT MINI-ENVIRONMENT (ME) TOOLS ARRANGEMENT
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系 === 107 === Contamination Free Manufacturing (CFM) is one of the most important requirements in Semiconductor high-tech facilities, especially for Integrated Circuits (IC) manufacturing. This concept has historically involved not only particle control (solids) but also...
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| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7auctj |