Design of CMOS MEMS Pressure Sensor and Readout Circuits
碩士 === 淡江大學 === 電機工程學系碩士班 === 107 === A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive pressure sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/m552qw |