Role of Ru,Hf,Ta-bottom electrode layers in CoFeB perpendicular magnetic anisotropy
碩士 === 國立雲林科技大學 === 材料科技研究所 === 107 === In this study, the influence of different electrode metals and their crystalline phase structure on the perpendicular magnetic anisotropy of CoFeB-based tunneling structures are investigated. The effectiveness of three kinds of transition metal Ru, Hf and Ta a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97ggz6 |