Texturization of Diamond-Wire-Sawn Single-Crystalline Si Using Alkaline and Copper Based Acid Solutions
碩士 === 國立雲林科技大學 === 材料科技研究所 === 107 === This study uses alkali etching and copper-based acid solution to make surface weaving of single-crystal line silicon chip, because the flat surface of the cut chip is not conducive to etching, and the lower the experimental temperature of acid etching, the wor...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/jznkbk |