Texturization of Diamond-Wire-Sawn Single-Crystalline Si Using Alkaline and Copper Based Acid Solutions

碩士 === 國立雲林科技大學 === 材料科技研究所 === 107 === This study uses alkali etching and copper-based acid solution to make surface weaving of single-crystal line silicon chip, because the flat surface of the cut chip is not conducive to etching, and the lower the experimental temperature of acid etching, the wor...

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Bibliographic Details
Main Authors: Tsai, Cheng-Yu, 蔡程宇
Other Authors: Wang, Shing- Dar
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/jznkbk