Study of Hf and Ta-bottom electrode layers in TbFeCo perpendicular magnetic anisotropy
碩士 === 國立雲林科技大學 === 材料科技研究所 === 107 === To attain perpendicular magnetic anisotropy for MRAM structure, a number of material systems like RE-TM alloys, Co/Pt and FePt multilayers etc. have been explored as a magnetic recording layer in pMTJs. The RE-TM alloys, in particular the amorphous TbFeCo allo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ew4s2p |