Texturization of diamond-wire-sawn single-crystalline Si using high temperature copper based acid solutions
碩士 === 國立雲林科技大學 === 材料科技研究所 === 107 === This work study surface texturization of diamond wire sawn (DWS) single-crystalline silicon wafer by metal assisted chemical etching (MACE). An unetched single-crystalline silicon wafer was used. A non-etched single crystal was etched in a Cu(NO3)2/HF/H2O2 sol...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xx2z46 |