The study of heteroepitaxial ZrN film on Si (100) substrate by reactive sputtering deposition and annealing
碩士 === 國立交通大學 === 材料科學與工程學系所 === 108 === ZrN has rock-salt crystal structure and is a conducting nitride with many excellent properties such as high melting point and high hardness. It can be appropriate buffer layer for growing diamond on Si wafer. This thesis focuses on the study of growth of epit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22qhp6 |