Linear Dimensionality Reductions for Optical Proximity Correction (OPC) and Etch Proximity Correction (EPC)
碩士 === 國立交通大學 === 電子研究所 === 108 === According to Moore’s Law prediction, IC components will continue to scale down in size. In the past few years, an IC takes tens of processes to produce. Nowadays, it takes thousands of processes to make an IC. In addition to the difficulty of the process steps, th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6ux36h |