Light activated Cl₂ etching of GaAs and optical holographic pattern formation
The photochemical reaction of Cl₂ gas with (100) GaAs was studied in this work. Thermal effects due to light induced heating of the GaAs substrate were isolated from photochemical effects. Light induced heating was calculated and the corresponding photothermal Cl₂ etching of GaAs was accounted for....
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| Format: | Others |
| Language: | English |
| Published: |
2009
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| Online Access: | http://hdl.handle.net/2429/14258 |